Compact Flow Control Unit
ควบคุมอัตราการการไหลของแก๊ส
CUBE MFC Series
Features
● Mass flow controller 1000 series and control power supply are all-in-one compact flow control unit.
● It can be used by connecting the gas fitting and power outlet.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal ： Analog (0～5VDC).
● Equipped with monitor terminal for setting / output voltage on the back.
● This product is ideal for use on the desktop, space saving.
● If you mount the main body and set the operation part in the panel cut part, it can be incorporated in various kinds of equipment.
Product Catalog
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◀ ［CUBE MFC Series］ Catalog Download. |
Specification
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Conpact Flow Control Unit |
CUBE MFC 1005 |
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Flow range (N2equivalent) |
10,20,30,50,100,200,300,500SCCM
1,2,3,5SLM |
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Gases |
Various Gases (Please consult about corrosive gas) |
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Valve type |
NO : Normally Open |
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Flow rate control range |
5～100％ F.S. |
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Accuracy |
±2％ F.S (Accuracy guaranteed between 15-35℃) |
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Setting signal |
0.25～5VDC |
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Output signal |
0～5VDC / Display : Scaling display (Setting signals and output signals can be displayed by switching the switches.) |
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Repeatability |
±0.2％ F.S |
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Response |
≦6sec |
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Operating differential pressure |
50～300KPa |
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Pressure resistance |
1MPa(G) |
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Operating temperature |
5-50℃, ≦85％RH |
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Leak integrity |
1×10-7Pa･m3/sec He |
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Drive power source |
85-260VAC : ≦500mA |
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Communication |
Analog : 0～5VDC |
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Wetted surface material |
SUS316L, PTFE, Fluoro-Rubber |
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Seal material |
Fluoro-Rubber |
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Actuator system |
Thermal |
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Surface treatment |
Machined finish |
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Standard fitting |
1/4in.SWL (equivalent), One-touch fittings, ※ For other fitting, please contact us. |
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Accessory |
Power cord, User's manual, Written guarantee |
External Dimensions
Ordering
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