1000 Series

Mass Flow Controller

1000 Series

1000 Series

● It is an analog model specializing the basic functions of the mass flow controller.
● Improved performance and reliability by basic functions pursuing original technology.
● Two type of Control Power Supply, Floor-standing "PA01" and Panel Mount "PA01P".
● Compact size.
● The suppression of Flow surge (overshoot) at the start (Requires more than 30 seconds of interval).
● Input & Output Signal : Analog (0~5VDC)
● To control the mass flow controller, a control power supply and a signal cable are required.

Product Catalog

C1005・1020/M1005・1020 (F.S.10SCCM~20SLM)

1000 Series Catalog
C1030・1050/M1030・1050 (F.S.30~50SLM)
C1100 (F.S.100LM)
1000 Series Catalog
Mass Flow Controller C1005 C1020 C1030/C1050 C1100
Mass Flow Meter M1005 M1020 M1030/M1050 -
Flow range (N2equivalent) 10,20,30,50,100,200,300,500SCCM
10,20SLM 30,50SLM 100LM
Gases Various Gases (Please consult about corrosive gas) Air, N2, Ar, H2, CO2, O2, He Air, N2
Valve type NO : Normally Open (Excluding Mass Flow Meter)
Flow rate control range 5-100% F.S (Excluding Mass Flow Meter)
Accuracy ±2% F.S (Accuracy guaranteed between 15-35℃)
Setting signal 0.25-5VDC (excluding Mass Flow Meter)
Output signal 0-5VDC
Repeatability ±0.2% F.S ±0.5% F.S
Response ≦6sec ≦15sec
Operating differential pressure 50-300KPa 200-300KPa
Pressure resistance 1MPa(G)
Operating temperature 5-50℃, ≦85%RH (Scope of accuracy guarantee : 15-35℃)
Leak integrity 1×10-7Pa・m3/sec He
Mounting attitude Free
Drive power source +15VDC:60mA、-15VDC:150mA
Communication Analog : 0-5VDC
Wetted surface material SUS316L, PTFE, Fluoro-Rubber
Seal material Fluoro-Rubber
Actuator system Thermal (excluding Mass Flow Meter)
Surface treatment Machined finish
Standard fitting 1/4in.SWL (equivalent), One-touch fittings,  ※ For other fitting, please contact us.
Accessory User's manual, Written guarantee
External Dimensions
1000 Series
1000 Series
Control power supply|Product Catalog
● To control the mass flow controller, a control power supply and a signal cable are required.
● It is a control power supply unit that controls the mass flow controller.
● Can be used with AC85-260V.
● Setting signals and output signals can be displayed by switching the switches.
● There are 2 types of panel mount type and floor stand type.
■Which type would you like?■
【PA01PS (panel mount type)】
【PA01S (floor stand type)】
■Scaling display (Set as full scale)
▼ [PA01PS] Catarog Download
▼ [PA01P] Catarog Download
PA01PS Catalog
PA01S Catarog
Signal cable
Signal cable Signal cable connecting mass flow controller and control power supply.
① SC01 : 1m
② SC02 : 2m
③ SC03 : 3m
Other than the above, please contact us.